Sputtering of Fe(100) due to low-energy ion bombardments: Molecular dynamics simulation

被引：3

作者：

Kim, Dong-Ho

Kim, Do Hyun

机构：

[1] Korean Inst Machinery & Mat, Surface Technol Res Ctr, Kyungnam 641010, South Korea

[2] Dept Chem & Biomol Engn, Taejon 305701, South Korea

来源：

SCRIPTA MATERIALIA | 2006年 / 55卷 / 11期

关键词：

molecular dynamic simulation; sputtering; iron; ion bombardment; YIELDS; FILMS; FE; SURFACE; METALS; ATOM; SPIN; CU;

D O I：

10.1016/j.scriptamat.2006.08.006

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Molecular dynamics simulations were carried out to investigate the sputtering of Fe(l 0 0) due to low-energy (<= 10 keV)Ar ion bombardments. Bohr potentials fitted to the results of ab initio calculations for diatomic pairs (Ar-Fe, Fe-Fe) were used as the repulsive screened Coulombic potentials in sputtering simulations. The sputter yields predicted by molecular dynamics were in good accordance with the available experimental data. The threshold energy for sputtering, distributions of kinetic energies of sputtered atoms and their depth of origins could also be obtained. (c) 2006 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved.

引用

页码：1043 / 1046

页数：4

共 28 条

[1] ANDERSON HH, 1981, SPUTTERING PARTICLE, V1, P173
[2] Interfacial mixing behavior of Fe-Al magnetic thin films: Molecular dynamics simulation
Chung, CY
Chung, YC
[J]. IEEE TRANSACTIONS ON MAGNETICS, 2005, 41 (10) : 3706 - 3708
[3] Spin and orbital moments of ultra-thin Fe films on various semiconductor surfaces
Claydon, JS
Niu, DX
Xu, YB
Telling, ND
Kirkman, IW
van der Laan, G
[J]. IEEE TRANSACTIONS ON MAGNETICS, 2005, 41 (10) : 3325 - 3327
[4] Molecular dynamics simulation of defect formation during energetic Cu deposition
Gilmore, CM
Sprague, JA
[J]. THIN SOLID FILMS, 2002, 419 (1-2) : 18 - 26
[5] Bombardment of Ni(100) surface with low-energy argons:: molecular dynamics simulations
Güvenç, ZB
Hippler, R
Jackson, B
[J]. THIN SOLID FILMS, 2005, 474 (1-2) : 346 - 357
[6] Repulsive interatomic potentials for noble gas bombardment of Cu and Ni targets
Karolewski, MA
[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2006, 243 (01) : 43 - 50
[7] Kalypso: a software package for molecular dynamics simulation of atomic collisions at surfaces
Karolewski, MA
[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2005, 230 : 402 - 405
[8] Tight-binding potentials for sputtering simulations with fcc and bcc metals
Karolewski, MA
[J]. RADIATION EFFECTS AND DEFECTS IN SOLIDS, 2001, 153 (03): : 239 - 255
[9] Molecular dynamics simulation of Cu and Ar ion sputtering of Cu (111) surfaces
Kress, JD
Hanson, DE
Voter, AF
Liu, CL
Liu, XY
Coronell, DG
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1999, 17 (05): : 2819 - 2825
[10] SPUTTERING YIELDS OF METALS FOR AR+ AND NE+ IONS WITH ENERGIES FROM 50 TO 600 EV
LAEGREID, N
WEHNER, GK
[J]. JOURNAL OF APPLIED PHYSICS, 1961, 32 (03) : 365 - &

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