Correlation of Raman spectra with carbon ion energy for amorphous diamond-like films produced with a mass-separated ion beam

被引:13
作者
Khriachtchev, LY [1 ]
Hakovirta, M [1 ]
Lappalainen, R [1 ]
Rasanen, M [1 ]
机构
[1] HELSINKI UNIV,CHEM PHYS LAB,FIN-00014 HELSINKI,FINLAND
关键词
D O I
10.1016/0375-9601(96)00346-5
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
The Raman spectra of hydrogen-free amorphous diamond-like films prepared using a mass-separated carbon ion beam and different deposition energies are investigated. The correlation between the numerical parameters of the Raman spectra in the 100 to 2100 cm(-1) range and the deposition energy, and consequently the sp(3) fraction, is demonstrated.
引用
收藏
页码:354 / 358
页数:5
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