Effects of secondary electron emission from a floating surface on the plasma sheath

被引：0

作者：

Taccogna, F ^{[1
]}

Longo, S ^{[1
]}

Capitelli, M ^{[1
]}

机构：

[1] Univ Bari, CNR, Dipartimento Chim, IMIP,Sect Bari, I-70126 Bari, Italy

来源：

VACUUM | 2004年 / 73卷 / 01期

关键词：

particle model; sheath; secondary electron emission;

D O I：

10.1016/j.vacuum.2003.12.039

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The paper describes the region between a Maxwellian plasma source and a floating surface by a 1D-3 V fully kinetic, electrostatic particle simulation. The electric field is self-consistently computed from the Poisson equation. The secondary electron emission is modelled by considering an expression for the secondary emission coefficient dependent on the primary electron energy and surface materials and a realistic secondary electron distribution function is introduced at the collector surface. The model is able to simulate the space-charge-limited conditions as well as the positively charged wall cases. (C) 2003 Elsevier Ltd. All rights reserved.

引用

页码：89 / 92

页数：4

共 9 条

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BIRDSALL CK, 1985, PLASMA PHYS COMPUTER

[2] SIMPLE CALCULATION OF ENERGY-DISTRIBUTION OF LOW-ENERGY SECONDARY ELECTRONS EMITTED FROM METALS UNDER ELECTRON-BOMBARDMENT [J].