Time-dependent degradation of threshold voltage in AlGaN/GaN high electron mobility transistors

被引:5
|
作者
Ma Xiao-Hua [1 ,2 ]
Jiang Yuan-Qi [1 ,2 ]
Wang Xin-Hua [3 ]
Lu Min [1 ,2 ]
Zhang Huo [2 ]
Chen Wei-Wei [1 ,2 ]
Liu Xin-Yu [3 ]
机构
[1] Xidian Univ, Sch Adv Mat & Nanotechnol, Xian 710071, Peoples R China
[2] Xidian Univ, Sch Microelect, Key Lab Wide Band Gap Semicond Mat & Devices, Xian 710071, Peoples R China
[3] Chinese Acad Sci, Inst Microelect, Key Lab Microelect Device & Integrated Technol, Beijing 100029, Peoples R China
关键词
AlGaN/GaN high electron mobility transistor; off-state stress; electron detrapping; degradation;
D O I
10.1088/1674-1056/23/1/017303
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
This paper gives a detailed analysis of the time-dependent degradation of the threshold voltage in AlGaN/GaN high electron mobility transistors (HEMTs) submitted to off-state stress. The threshold voltage shows a positive shift in the early stress, then turns to a negative shift. The negative shift of the threshold voltage seems to have a long recovery time. A model related with the balance of electron trapping and detrapping induced by shallow donors and deep acceptors is proposed to explain this degradation mode.
引用
收藏
页数:4
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