X-ray induced decomposition of gold nitride

被引：33

作者：

Butenko, Yu. V.

Alves, L.

Brieva, A. C.

Yang, J.

Krishnamurthy, S.

Siller, L. ^{[1
]}

机构：

[1] Univ Newcastle Upon Tyne, Sch Chem Engn & Adv Mat, Newcastle Upon Tyne NE1 7RU, Tyne & Wear, England

[2] Univ Newcastle Upon Tyne, Inst Nanoscale Sci & Technol, Newcastle Upon Tyne NE1 7RU, Tyne & Wear, England

来源：

CHEMICAL PHYSICS LETTERS | 2006年 / 430卷 / 1-3期

基金：

英国工程与自然科学研究理事会;

关键词：

D O I：

10.1016/j.cplett.2006.08.096

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Gold films containing gold nitride have been produced by nitrogen reactive ion sputtering and characterized by X-ray photoemission spectroscopy. N1s core-level spectra from the films show a peak at 397.0 +/- 0.2 eV attributed to gold nitride species. The intensity of the nitride peak decays with measurement time, demonstrating that this material decomposes under X-ray irradiation. Atomic force microscopy shows that the nitride containing films are also sensitive to electron beam irradiation, indicating that X-ray or electron beam lithography may be used to directly write patterns on a gold nitride surface. (c) 2006 Published by Elsevier B.V.

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页码：89 / 92

页数：4

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