A 6-degree-of-freedom measurement system for the accuracy of X-Y stages

被引：112

作者：

Fan, KC ^{[1
]}

Chen, MJ ^{[1
]}

机构：

[1] Natl Taiwan Univ, Dept Mech Engn, Taipei 10764, Taiwan

来源：

PRECISION ENGINEERING-JOURNAL OF THE AMERICAN SOCIETY FOR PRECISION ENGINEERING | 2000年 / 24卷 / 01期

关键词：

X-Y stage; 6-degree-of-freedom; motion accuracy;

D O I：

10.1016/S0141-6359(99)00021-5

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A precision 6-degree-of-freedom measurement system has been developed for simultaneous on-line measurements of six motion errors of an X-Y stage. The system employs four laser Doppler scales and two quadrant photo detectors to detect the positions and the rotations of an optical reflection device mounted on the top of the X-Y stage. Compared to the HP5528A system, the linear positioning accuracy of the developed measurement system is better than +/-0.1 mu m to the range of 200 mm and the vertical straightness error is within +/-1.5 mu m for the measuring range of +/-0.1 mm. The yaw and pitch errors are about +/-1 arcsec, and the roll error is about +/-3 arcsec within the range of +/-50 arcsec, (C) 2000 Elsevier Science Inc. All rights reserved.

引用

页码：15 / 23

页数：9

共 16 条

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