Microstructure and Ferroelectric Properties of Direct-Patternable Bi3.25La0.75Ti3O12 Films Prepared by Photochemical Metal-Organic Deposition

被引：0
作者：
Park, Hyeong-Ho [1 ]
Kim, Hyuncheol [1 ]
Wang, Seok-Joo [1 ]
Park, Hyung-Ho [1 ]
Kim, Tae Song [2 ]
Hill, Ross H. [3 ,4 ]
机构：
[1] Yonsei Univ, Dept Mat Sci & Engn, Seoul 120749, South Korea
[2] Korea Inst Sci & Technol, Microsyst Res Ctr, Seoul 136791, South Korea
[3] Simon Fraser Univ, Labs 4D, Burnaby, BC V5A 1S6, Canada
[4] Simon Fraser Univ, Dept Chem, Burnaby, BC V5A 1S6, Canada
来源：
FERROELECTRICS | 2009年 / 386卷
关键词：
Thin film; Bi3.25La0.75Ti3O12; photochemical metal-organic deposition; direct-patterning; INDUCTIVELY-COUPLED PLASMA; TITANATE THIN-FILMS; ELECTRICAL-PROPERTIES; CRYSTALLIZATION; ORIENTATION; BI4TI3O12;
D O I：
10.1080/00150190902961199
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The microstructure and ferroelectric properties of Bi3.25La0.75Ti3O12 films prepared by photochemical metal-organic deposition using photosensitive precursors were characterized. The diffraction intensities showed a distribution similar to Bi3.25La0.75Ti3O12 ceramics, and Pt(111) was found to not influence the growth orientation of Bi3.25La0.75Ti3O12 films. The values of measured remnant polarization and dielectric constant of Bi3.25La0.75Ti3O12 films annealed at 650 and 700 degrees C were 8.7, 16.0 mu C/cm(2) and 172, 276, respectively. The films remained free of fatigue up to 10(9) switching cycles. These results suggest the possible application of ferroelectric Bi3.25La0.75Ti3O12 film, relatively easily and without high cost process such as dry etching.
引用
收藏
页码：14 / 21
页数：8
相关论文
共 50 条
  • [31] Effects of annealing ambient on ferroelectric properties and surface chemistry of sol-gel derived Bi3.25La0.75Ti3O12 thin films
    Li, Jia
    Yoshitake, Michiko
    Song, Weijie
    JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, 2014, 25 (01) : 343 - 348
  • [32] Ferroelectric properties and leakage current mechanisms of Bi3.25La0.75Ti3O12 thin films with a-axis preferred orientation prepared by sol-gel method
    Kao, M. C.
    Chen, H. Z.
    Young, S. L.
    MATERIALS LETTERS, 2008, 62 (4-5) : 629 - 632
  • [33] Effect of SrTiO3 buffer layer on the phase formation and properties of direct-patternable BiFeO3 thin films fabricated using photochemical metal-organic deposition
    Lee, Hong-Sub
    Choi, Hye-Jung
    Chung, Sung-Woong
    Park, Hyung-Ho
    JOURNAL OF THE CERAMIC SOCIETY OF JAPAN, 2010, 118 (1383) : 1024 - 1027
  • [34] Mechanical stress induced voltage shift in polycrystalline Bi3.25La0.75Ti3O12 thin films
    Wu, Xiumei
    Zhai, Ya
    Kan, Yi
    Lu, Xiaomei
    Zhu, Jinsong
    JOURNAL OF APPLIED PHYSICS, 2009, 106 (08)
  • [35] Improved fatigue endurance in Mn-doped Bi3.25La0.75Ti3O12 thin films
    Singh, S. K.
    Ishiwara, H.
    SOLID STATE COMMUNICATIONS, 2006, 140 (9-10) : 430 - 434
  • [36] Electric and ferroelectric properties of PZT/BLT multilayer films prepared by photochemical metal-organic deposition
    Park, Hyeong-Ho
    Lee, Hong-Sub
    Park, Hyung-Ho
    Hill, Ross H.
    Hwang, Yun Taek
    APPLIED SURFACE SCIENCE, 2009, 255 (07) : 4197 - 4200
  • [37] The Effect of La-Doped Bi4Ti3O12 Buffer Layer on Crystallinity and Ferroelectric Properties of PbZr0.58Ti0.42O3/Bi3.25La0.75Ti3O12 Multilayered Thin Films
    Li, Jianjun
    Wen, Xinyi
    Wu, Yunyi
    Yu, Jun
    INTEGRATED FERROELECTRICS, 2011, 124 : 170 - 177
  • [38] Bi3.25La0.75Ti3O12 thin film capacitors for energy storage applications
    Yang, B. B.
    Guo, M. Y.
    Song, D. P.
    Tang, X. W.
    Wei, R. H.
    Hu, L.
    Yang, J.
    Song, W. H.
    Dai, J. M.
    Lou, X. J.
    Zhu, X. B.
    Sun, Y. P.
    APPLIED PHYSICS LETTERS, 2017, 111 (18)
  • [39] Enhanced Raman scattering and photoluminescence of Bi3.25La0.75Ti3O12 nanotube arrays for optical and ferroelectric multifunctional applications
    Zhang, J. Z.
    Han, M. J.
    Li, Y. W.
    Hu, Z. G.
    Chu, J. H.
    APPLIED PHYSICS LETTERS, 2012, 101 (08)
  • [40] Characteristics of direct-patternable SnO2:Pt nanocomposite thin films fabricated by photochemical metal-organic deposition
    Yong-June Choi
    Chae-Jung Kim
    Hyung-Ho Park
    Journal of Materials Research, 2011, 26 : 2860 - 2866
12345