Microstructure and Ferroelectric Properties of Direct-Patternable Bi3.25La0.75Ti3O12 Films Prepared by Photochemical Metal-Organic Deposition

被引：0

作者：

Park, Hyeong-Ho ^{[1
]}

Kim, Hyuncheol ^{[1
]}

Wang, Seok-Joo ^{[1
]}

Park, Hyung-Ho ^{[1
]}

Kim, Tae Song ^{[2
]}

Hill, Ross H. ^{[3
,4
]}

机构：

[1] Yonsei Univ, Dept Mat Sci & Engn, Seoul 120749, South Korea

[2] Korea Inst Sci & Technol, Microsyst Res Ctr, Seoul 136791, South Korea

[3] Simon Fraser Univ, Labs 4D, Burnaby, BC V5A 1S6, Canada

[4] Simon Fraser Univ, Dept Chem, Burnaby, BC V5A 1S6, Canada

来源：

FERROELECTRICS | 2009年 / 386卷

关键词：

Thin film; Bi3.25La0.75Ti3O12; photochemical metal-organic deposition; direct-patterning; INDUCTIVELY-COUPLED PLASMA; TITANATE THIN-FILMS; ELECTRICAL-PROPERTIES; CRYSTALLIZATION; ORIENTATION; BI4TI3O12;

D O I：

10.1080/00150190902961199

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The microstructure and ferroelectric properties of Bi3.25La0.75Ti3O12 films prepared by photochemical metal-organic deposition using photosensitive precursors were characterized. The diffraction intensities showed a distribution similar to Bi3.25La0.75Ti3O12 ceramics, and Pt(111) was found to not influence the growth orientation of Bi3.25La0.75Ti3O12 films. The values of measured remnant polarization and dielectric constant of Bi3.25La0.75Ti3O12 films annealed at 650 and 700 degrees C were 8.7, 16.0 mu C/cm(2) and 172, 276, respectively. The films remained free of fatigue up to 10(9) switching cycles. These results suggest the possible application of ferroelectric Bi3.25La0.75Ti3O12 film, relatively easily and without high cost process such as dry etching.

引用

页码：14 / 21

页数：8

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