Analysis of a calibration method for non-stationary CVD multi-layered graphene-based gas sensors

被引：7
作者：
Ricciardella, Filiberto [1 ]
Polichetti, Tiziana [2 ]
Vollebregt, Sten [1 ]
Alfano, Brigida [2 ]
Massera, Ettore [2 ]
Sarro, Pasqualina M. [1 ]
机构：
[1] Delft Univ Technol, Dept Microelect, Feldmannweg 17, NL-2628 CT Delft, Netherlands
[2] ENEA Res Ctr, Piazzale Enrico Fermi 1, I-80055 Naples, Italy
来源：
NANOTECHNOLOGY | 2019年 / 30卷 / 38期
关键词：
graphene; gas sensors; signal steady state and recovery; time-differential signal output; calibration; NO2; SENSING PROPERTIES; CARBON NANOTUBES;
D O I：
10.1088/1361-6528/ab2aac
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
Limitations such as lack of detected stationary signal and slow signal recovery after detection currently affect graphene-based chemi-sensors operating at room temperature. In this work, we model the behavior of a sensor in a test chamber having limited volume and simulating the environmental conditions. From this model, we mathematically derive the calibration method for the sensor. The approach, focused on the time differential of the signal output, is tested on multilayered graphene (MLG)-based sensors towards the chosen target gas (nitrogen dioxide) in the range from 0.12 to 1.32 ppm. MLG acting as sensing layer is synthesized by chemical vapor deposition. Our study paves the route for a wider applicability of the analysis to calibrate the class of devices affected by non-stationary and recovery issues.
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页数：8
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