High Responsivity and Low NEP of Room-Temperature Terahertz Antenna-Coupled Microbolometers with Meander Titanium Thermistor

被引：0

作者：

Hiromoto, Norihisa ^{[1
]}

Banerjee, Amit ^{[2
]}

Elamaran, Durgadevi ^{[1
]}

Aoki, Makoto ^{[3
]}

Apriono, Catur ^{[4
]}

Satoh, Hiroaki ^{[1
]}

Bruendermann, Erik ^{[5
]}

Rahardjo, Eko Tjipto ^{[4
]}

Inokawa, Hiroshi ^{[1
]}

机构：

[1] Shizuoka Univ, Hamamatsu, Shizuoka 4328011, Japan

[2] Natl Univ Singapore, Lower Kent Ridge Rd, Singapore 119077, Singapore

[3] Natl Inst Informat & Commun Technol NICT, Tokyo 1848795, Japan

[4] Univ Indonesia, Depok 16424, Indonesia

[5] Karlsruhe Inst Technol KIT, D-76344 Karlsruhe, Germany

来源：

2019 44TH INTERNATIONAL CONFERENCE ON INFRARED, MILLIMETER, AND TERAHERTZ WAVES (IRMMW-THZ) | 2019年

关键词：

D O I：

10.1109/irmmw-thz.2019.8874346

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In order to make room-temperature terahertz (ITU) detectors with high-detectivity, we have studied room-temperature THz antenna-coupled bolometers with titanium (Ti) meander-line thermistor fabricated on a high-resistivity silicon (Si) substrate by MEMS process. In this paper, we report the spectrum of responsivity which spreads at least in the range of 0.1 THz width around 1 THz. There are high-responsivity bands with the orders of 1000 V/W in the spectrum. Thanks to the meander-line and low noise of metal thermistors, we have achieved good noise-equivalent power (NEP) of the order of 10(-11) W/Hz(1/2) and response speed of 5 kHz for the room-temperature antenna-coupled bolometers with a Ti thermistor 0.1 mu m-wide and 90 mu m-long.

引用

页数：2

共 23 条

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