Surface Modification of Titanium Dioxide Thin Film for ss-DNA Detection

This paper studies the Capacitance-Frequency of titanium dioxide (TiO2) thin film-based interdigitated electrodes (IDEs) for ss-DNA immobilization. TiO2 thin film was deposited on P-type silicon dioxide (SiO2) (1 0 0) substrates using monoethanolamine (MEA) sol-gel route by spin-coating method. Titanium butoxide was used as a precursor source while ethanol and MEA were used as a disperser and stabilizer respectively. Metal IDEs of aluminium (Al) was deposited on the synthesized films for the electrical characterization. From the electrical data, it proves that the synthesized TiO2 thin film is effective and can be used for the synthesis of TiO2 thin films with biomedical application.