Epitaxial growth of GaN on copper substrates

被引:40
作者
Inoue, S.
Okamoto, K.
Matsuki, N.
Kim, Tae-Won
Fujioka, H.
机构
[1] KAST, Takatsu Ku, Kawasaki, Kanagawa 2130012, Japan
[2] Univ Tokyo, Inst Ind Sci, Meguro Ku, Tokyo 1538505, Japan
关键词
D O I
10.1063/1.2213178
中图分类号
O59 [应用物理学];
学科分类号
摘要
We have grown GaN films on Cu(111) substrates using pulsed laser deposition. We have found that GaN(0001) grows epitaxially on Cu(111) when employing low temperature grown AlN buffer layers with an in-plane epitaxial relationship of AlN[11 (2) over bar0]parallel to Cu[1 (2) over bar0] Reflection high-energy electron diffraction images have exhibited sharp streaky patterns, indicating that GaN grows with a flat surface. Electron backscattering diffraction observations have revealed that neither 30 degrees rotational domains nor cubic phase domains exist in the GaN films. Spectroscopic ellipsometry measurements have shown that the heterointerfaces in the GaN/AlN/Cu structure are abrupt. The epitaxial growth of GaN on Cu substrates is likely to raise the power limit for future light emitting and electron devices due to the high thermal conductivity of Cu.
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页数:3
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