Epitaxial growth of GaN on copper substrates

被引:39
|
作者
Inoue, S.
Okamoto, K.
Matsuki, N.
Kim, Tae-Won
Fujioka, H.
机构
[1] KAST, Takatsu Ku, Kawasaki, Kanagawa 2130012, Japan
[2] Univ Tokyo, Inst Ind Sci, Meguro Ku, Tokyo 1538505, Japan
关键词
D O I
10.1063/1.2213178
中图分类号
O59 [应用物理学];
学科分类号
摘要
We have grown GaN films on Cu(111) substrates using pulsed laser deposition. We have found that GaN(0001) grows epitaxially on Cu(111) when employing low temperature grown AlN buffer layers with an in-plane epitaxial relationship of AlN[11 (2) over bar0]parallel to Cu[1 (2) over bar0] Reflection high-energy electron diffraction images have exhibited sharp streaky patterns, indicating that GaN grows with a flat surface. Electron backscattering diffraction observations have revealed that neither 30 degrees rotational domains nor cubic phase domains exist in the GaN films. Spectroscopic ellipsometry measurements have shown that the heterointerfaces in the GaN/AlN/Cu structure are abrupt. The epitaxial growth of GaN on Cu substrates is likely to raise the power limit for future light emitting and electron devices due to the high thermal conductivity of Cu.
引用
收藏
页数:3
相关论文
共 50 条
  • [1] GaN epitaxial growth on neodium gallate substrates
    Okazaki, H
    Arakawa, A
    Asahi, T
    Oda, O
    Aiki, K
    SOLID-STATE ELECTRONICS, 1997, 41 (02) : 263 - 266
  • [2] Epitaxial Growth of GaN on Patterned Sapphire Substrates
    Tadatomo, Kazuyuki
    III-NITRIDE BASED LIGHT EMITTING DIODES AND APPLICATIONS, 2ND EDITION, 2017, 133 : 69 - 92
  • [3] Epitaxial growth of GaN films on silicon substrates by MOVPE
    Yokouchi, K
    Araki, T
    Nagatomo, T
    Omoto, O
    SILICON CARBIDE AND RELATED MATERIALS 1995, 1996, 142 : 867 - 870
  • [4] Epitaxial growth of GaN films on unconventional oxide substrates
    Wang, Wenliang
    Yang, Weijia
    Wang, Haiyan
    Li, Guoqiang
    JOURNAL OF MATERIALS CHEMISTRY C, 2014, 2 (44) : 9342 - 9358
  • [5] Epitaxial growth of GaN films on unconventional oxide substrates
    Wang, Wenliang
    Yang, Weijia
    Wang, Haiyan
    Li, Guoqiang
    Journal of Materials Chemistry C, 2014, 2 (44): : 9342 - 9358
  • [6] Substrates with Diamond Heat Sink for Epitaxial GaN Growth
    I. O. Maiboroda
    I. A. Chernykh
    V. S. Sedov
    A. S. Altakhov
    A. A. Andreev
    Yu. V. Grishchenko
    E. M. Kolobkova
    A. K. Mart’yanov
    V. I. Konov
    M. L. Zanaveskin
    Technical Physics Letters, 2021, 47 : 353 - 356
  • [7] Substrates with Diamond Heat Sink for Epitaxial GaN Growth
    Maiboroda, I. O.
    Chernykh, I. A.
    Sedov, V. S.
    Altakhov, A. S.
    Andreev, A. A.
    Grishchenko, Yu, V
    Kolobkova, E. M.
    Mart'yanov, A. K.
    Konov, V., I
    Zanaveskin, M. L.
    TECHNICAL PHYSICS LETTERS, 2021, 47 (05) : 353 - 356
  • [8] Epitaxial growth of ZnO films on Si substrates using an epitaxial GaN buffer
    Nahhas, A
    Kim, HK
    Blachere, J
    APPLIED PHYSICS LETTERS, 2001, 78 (11) : 1511 - 1513
  • [9] Room-temperature epitaxial growth of GaN on conductive substrates
    Ohta, J
    Fujioka, H
    Oshima, M
    APPLIED PHYSICS LETTERS, 2003, 83 (15) : 3060 - 3062
  • [10] Nucleation mechanism for epitaxial growth of GaN on patterned sapphire substrates
    Zhou, Shizhong
    Lin, Zhiting
    Wang, Haiyan
    Qiao, Tian
    Zhong, Liyi
    Lin, Yunhao
    Wang, Wenliang
    Yang, Weijia
    Li, Guoqiang
    JOURNAL OF ALLOYS AND COMPOUNDS, 2014, 610 : 498 - 505