Characterization of surface enhancement of carbon ion-implanted TiN coatings by metal vapor vacuum arc ion implantation

被引：21

作者：

Chang, CL ^{[1
]}

Wang, DY ^{[1
]}

机构：

[1] Mingdao Univ, Appl Sci Res Ctr, Changhua 523, Taiwan

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 2002年 / 194卷 / 04期

关键词：

MEVVA; ion implantation; ion energy; ion dose; TiN;

D O I：

10.1016/S0168-583X(02)01030-3

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

The modification of the surfaces of energetic carbon-implanted TiN films using metal vapor vacuum arc (MEVVA) ion implantation was investigated, by varying ion energy and dose. The microhardness, microstructure and chemical states of carbon, implanted on the surface layer of TiN films, were examined, as functions of ion energy and dose, by nanoindenter, transmission electron microscopy, Auger electron spectroscopy, X-ray photoelectron spectroscopy and X-ray diffraction. Results revealed that the microhardness increased from 16.8 up to 25.3 GPa and the friction coefficient decreased to approximately 0.2, depending on the implanted ion energy and dose. The result is attributed to the new microcrystalline phases of TiCN and TiC formed, and carbon concentration saturation of the implanted matrix can enhance the partial mechanical property of TiN films after MEVVA treatment. The concentration distribution, implantation depth and chemical states of carbon-implanted TiN coatings depended strongly on the ion dose and energy. (C) 2002 Elsevier Science B.V. All rights reserved.

引用

页码：463 / 468

页数：6

共 20 条

[1] METAL PLASMA IMMERSION ION-IMPLANTATION AND DEPOSITION USING VACUUM-ARC PLASMA SOURCES [J].