共 75 条
[21]
Development of mesoscopic polymer gripper system guided by precision design axioms
[J].
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY,
2003, 27 (04)
:362-369
[23]
Chen T, 2008, LECT NOTES ARTIF INT, V5315, P207, DOI 10.1007/978-3-540-88518-4_23
[25]
Polymer mems-based microgripper for single cell manipulation
[J].
MEMS 2004: 17TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST,
2004,
:17-20
[26]
COAKLEY WT, 1989, J CHEM TECHNOL BIOT, V44, P43
[29]
Effect of SF6 flow rate on the etched surface profile and bottom grass formation in deep reactive ion etching process
[J].
INTERNATIONAL MEMS CONFERENCE 2006,
2006, 34
:577-582
[30]
Greminger M. A., 2005, 2005 IEEE/RSJ International Conference on Intelligent Robots and Systems, P2814