Due to the rapid growth of the information and communication technology, most system developments are required not only the high functionality but also the flexibility to collaborate with the other one through the network. For the successful implementation of the difficult development, the conceptual design process in which the various stakeholders' requirements and their bottlenecks are discussed, has become important. This paper introduces the multispace quality function deployment (M-QFD) and its analytical methods and illustrates their application to a lithography system design. M-QFD is comprised of four deployment charts which includes the four types of design elements: value, meaning, state, and attribute. M-QFD enables designers to extract the design elements based on diverse requirements (requirements of the customer, company, society, etc.) and the circumstance of the design objects (user physique, ambient temperature, etc.). In addition, the analytical methods for M-QFD (correspondence analysis, interpretive structural modeling, design structure matrix, and multi domain matrix) enable them to easily understand the design element relationships.