Solution-processable low-CTE polybenzoxazoles

被引:19
作者
Hasegawa, M
Kobayashi, J
Vladimirov, L
机构
[1] Toho Univ, Fac Sci, Dept Chem, Chiba 2748510, Japan
[2] Russian Acad Sci, Inst Chem Phys, Moscow 117334, Russia
关键词
D O I
10.2494/photopolymer.17.253
中图分类号
O63 [高分子化学(高聚物)];
学科分类号
070305 ; 080501 ; 081704 ;
摘要
Polybenzoxazoles (PBO) are also expected as low-K & low-CTE dielectric materials as well as polyimides. High molecular weight PBO precursors, polyhydroxyamides (PHAs), were prepared from silylated bis(3-hydroxy4-amino)biphenyl(p-HAB) and dichlorides of terephthalic acid (TPA) or trans-1,4-cyclohexanedicarboxylic acid in DMAc/ITMPA in the presence of pyridine and LiCl. After precipitation of the PHA solution into water to remove the salts, it was difficult to re-dissolve into salt-free aprotic solvents. Therefore, the salt-containing PHA solution was cast on a glass plate and washed with water to remove salt, then the dried films fixed in a frame were heated at 400degreesC/1h to ensure complete transformation to PBO. The obtained PBO films showed a much lower K, a lower CTE and a higher Tg than the corresponding PIs. The use of a fluorine-containing bis(o-aminophenol) as a comonomer for the homo p-HAB/TPA system improved significantly the solubility into salt-free solvents. Another PHA derived from an isomer of p-HAB, bis(4-hydroxy-3-amino)biphenyl (m-HAB) and TPA also showed a high solubility. These new PBO systems made possible the convenient film formation process (cast-drying-thermal treatment like PI systems) for microelectronic applications. Simultaneously, these PBO films maintained comparatively low K values, considerable low CTEs, and high Tg's as in the homo p-HAB/TPA systems.
引用
收藏
页码:253 / 258
页数:6
相关论文
共 13 条
[1]  
Coburn J.C., 1996, Polyimides: Fundamentals and Applications, P207
[2]   SYNTHESIS AND PROPERTIES OF FLUORINATED POLYIMIDES FROM NOVEL 2,2'-BIS(FLUOROALKOXY)BENZIDINES [J].
FEIRING, AE ;
AUMAN, BC ;
WONCHOBA, ER .
MACROMOLECULES, 1993, 26 (11) :2779-2784
[3]  
Goto K., 2001, Journal of Photopolymer Science and Technology, V14, P33, DOI 10.2494/photopolymer.14.33
[4]  
GOTO K, 2002, LATEST POLYIMIDES FU, P270
[5]   Spontaneous molecular orientation of polyimides induced by thermal imidization .2. In-plane orientation [J].
Hasegawa, M ;
Matano, T ;
Shindo, Y ;
Sugimura, T .
MACROMOLECULES, 1996, 29 (24) :7897-7909
[6]   Polyimides containing trans-1,4-cyclohexane unit.: Polymerizability of their precursors and Low-CTE, low-K and high-Tg properties [J].
Hasegawa, M ;
Koyanaka, N .
HIGH PERFORMANCE POLYMERS, 2003, 15 (01) :47-64
[7]   Semi-aromatic polyimides with low dielectric constant and low CTE [J].
Hasegawa, M .
HIGH PERFORMANCE POLYMERS, 2001, 13 (02) :S93-S106
[8]  
Imai Y., 2002, LATEST POLYIMIDES FU
[9]   Nonaromatic polyimides derived from cycloaliphatic monomers [J].
Matsumoto, T .
MACROMOLECULES, 1999, 32 (15) :4933-4939
[10]   POLYIMIDE DERIVED FROM 2,2'-BIS(TRIFLUOROMETHYL)-4,4'-DIAMINOBIPHENYL .1. SYNTHESIS AND CHARACTERIZATION OF POLYIMIDES PREPARED WITH 2,2-BIS(3,4-DICARBOXYPHENYL)HEXAFLUOROPROPANE DIANHYDRIDE OR PYROMELLITIC DIANHYDRIDE [J].
MATSUURA, T ;
HASUDA, Y ;
NISHI, S ;
YAMADA, N .
MACROMOLECULES, 1991, 24 (18) :5001-5005