Swift heavy ion induced recrystallization in cubic silicon carbide: New insights from designed experiments and MD simulations

被引:19
作者
Debelle, A. [1 ]
Backman, M. [2 ,3 ,4 ]
Thome, L. [1 ]
Nordlund, K. [3 ,4 ]
Djurabekova, F. [3 ,4 ]
Weber, W. J. [2 ,5 ]
Monnet, I. [6 ]
Pakarinen, O. H. [3 ,4 ,5 ]
Garrido, F. [1 ]
Paumier, F. [7 ]
机构
[1] Univ Paris 11, CSNSM, CNRS, IN2P3, F-91405 Orsay, France
[2] Univ Tennessee, Dept Mat Sci & Engn, Knoxville, TN 37996 USA
[3] Univ Helsinki, Helsinki Inst Phys, FI-00014 Helsinki, Finland
[4] Univ Helsinki, Dept Phys, FI-00014 Helsinki, Finland
[5] Oak Ridge Natl Lab, Div Mat Sci & Technol, Oak Ridge, TN 37831 USA
[6] Univ Caen, CIMAP, CNRS, CEA,ENSICAEN, F-14070 Caen 5, France
[7] Univ Poitiers, CNRS, ENSMA, Inst PPRIME, F-86962 Futuroscope, France
关键词
Irradiation; SiC; Swift heavy ion; Recrystallization; DAMAGE ACCUMULATION; DEFECT PRODUCTION; FERROMAGNETISM; IMPLANTATION; SEMICONDUCTORS; AMORPHIZATION; IRRADIATION; RECOVERY;
D O I
10.1016/j.nimb.2013.10.080
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
3C-SiC single crystals have been initially irradiated in the nuclear energy loss regime with 100 keV Fe ions to fluences ranging from 4 x 10(13) to 4 x 10(14) cm(-2) (i.e. 0.07-0.7 dpa). RBS/C measurements indicate that SiC rapidly becomes amorphous (at similar to 0.4 dpa). Two damaged SiC crystals exhibiting a different defective structure have been subsequently irradiated in the electronic energy loss regime with 870 MeV swift heavy (Pb) ions (SHIs) up to a fluence of 4 x 10(13) cm(-2). Initially fully amorphous SiC layers showed a decrease in size after SHI irradiation with a recrystallization occurring at the amorphous-crystalline interface. On the contrary, partially amorphous crystals for which onset of amorphization just initiated at the damage peak recovered over the entire damage thickness. Variation of amorphous thickness or disorder level has been monitored as a function of Pb ion fluence, which allowed deriving recrystallization kinetics. Data have been fitted with the direct-impact model and recrystallization cross-sections and threshold values for recovery have been determined for both types of initially defective structures. Differences are qualitatively discussed in terms of nature and density of irradiation defects. All experimental trends have been successfully reproduced by molecular dynamics simulations that mimicked thermal spikes induced by SHIs. (C) 2014 Elsevier B.V. All rights reserved.
引用
收藏
页码:326 / 331
页数:6
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