Multi-Purpose Tool for Checking the Microfabrication Products

被引：0
|
作者：
De Pasquale, G. [1 ]
Soma, A. [1 ]
机构：
[1] Politecn Torino, Dept Mech, Corso Duca Abruzzi 24, I-10129 Turin, Italy
来源：
NANOTECHNOLOGY 2011: ELECTRONICS, DEVICES, FABRICATION, MEMS, FLUIDICS AND COMPUTATIONAL, NSTI-NANOTECH 2011, VOL 2 | 2011年
关键词：
MEMS; building processes; on-line control; material characterization;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper introduces a multi-purpose tool addressed to the microfabrication processes monitoring and material property measurement at the wafer level during both process development and manufacturing. Some procedures with high levels of automation and on-line controllability are introduced; the final goal is to provide compact algorithms for the real-time checking of building processes and material properties.
引用
收藏
页码：340 / 343
页数：4
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