Digital photonic production of 3D micro fluidics in glass by high speed micro scanner

被引：1
|
作者：
Gottmann, Jens [1 ,2 ]
Hermans, Martin [1 ,2 ]
Ortmann, Juergen [1 ,2 ]
机构：
[1] Rhein Westfal TH Aachen, Lehrstuhl Lasertech, Steinbachstr 15, D-52074 Aachen, Germany
[2] LightFab Course Inc, D-52074 Aachen, Germany
来源：
PROGRESS IN ULTRAFAST LASER MODIFICATIONS OF MATERIALS | 2013年 / 8卷
关键词：
LASER; FABRICATION; MICROSTRUCTURES; SAPPHIRE;
D O I：
10.1051/matecconf/20130805003
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Digital photonic production of 3D microfluidic devices and assembled micro mechanics inside fused silica glass is carried out using In-volume Selective Laser-induced Etching (ISLE). From CAD data of digital 3D objects the trajectories of the laser focus are automatically generated. The CAM software has been developed controlling different fs-and ps-lasers, the beam deflection systems and the translation stages to produce the structures automatically.
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页数：2
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