Physical Characterization and Effect of Effective Surface Area on the Sensing Properties of Tin Dioxide Thin Solid Films in a Propane Atmosphere

被引:30
作者
Gomez-Pozos, Heberto [1 ]
Luis Gonzalez-Vidal, Jose [1 ]
Alberto Torres, Gonzalo [1 ]
de la Luz Olvera, Maria [2 ]
Castaneda, Luis [3 ]
机构
[1] Univ Autonoma Estado Hidalgo, ICBI, Area Acad Comp, Mineral De La Reforma 56092, Hidalgo, Mexico
[2] Inst Politecn Nacl, CINVESTAV IPN, Ctr Invest & Estudios Avanzados, Dept Ingn Elect SEES, Mexico City 07000, DF, Mexico
[3] Inst Politecn Nacl, Escuela Super Ingn Mecan & Elect, Unidad Ticoman, Mexico City 07340, DF, Mexico
关键词
gas sensors; SnO2; thin solid films; GAS SENSOR; SPRAY-PYROLYSIS; TEMPERATURE; SENSITIVITY;
D O I
10.3390/s140100403
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
The physical properties and the effect of effective surface area (ESA) on the sensing properties of tin dioxide [SnO2] thin films in air and propane [C3H8] atmosphere as a function of operating temperature and gas concentration have been studied in this paper. SnO2 thin films with different estimated thicknesses (50, 100 and 200 nm) were deposited on glass substrates by the chemical spray technique. Besides, they were prepared at two different deposition temperatures (400 and 475 degrees C). Tin chloride [SnCl4 center dot 5H(2)O] with 0.2 M concentration value and ethanol [C2H6O] were used as tin precursor and solvent, respectively. The morphological, and structural properties of the as-prepared films were analyzed by AFM and XRD, respectively. Gas sensing characteristics of SnO2 thin solid films were measured at operating temperatures of 22, 100, 200, and 300 degrees C, and at propane concentration levels (0, 5, 50, 100, 200, 300, 400, and 500 ppm). ESA values were calculated for each sample. It was found that the ESA increased with the increasing thickness of the films. The results demonstrated the importance of the achieving of a large effective surface area for improving gas sensing performance. SnO2 thin films deposited by spray chemical were chosen to study the ESA effect on gas sensing properties because their very rough surfaces were appropriate for this application.
引用
收藏
页码:403 / 415
页数:13
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