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The Study of Piezoelectric Lateral-Electric-Field-Excited Resonator
被引:17
作者:
Zaitsev, Boris D.
[1
]
Kuznetsova, Iren E.
[2
]
Shikhabudinov, Alexander M.
[1
]
Teplykh, Andrey A.
[1
]
Borodina, Irina A.
[1
]
机构:
[1] Russian Acad Sci, Inst Radio Engn & Elect, Saratov Branch, Saratov, Russia
[2] Russian Acad Sci, Inst Radio Engn & Elect, Moscow 103907, Russia
关键词:
ACOUSTIC-WAVE SENSOR;
LANGASITE;
DRIVEN;
PLATES;
D O I:
10.1109/TUFFC.2014.6689784
中图分类号:
O42 [声学];
学科分类号:
070206 ;
082403 ;
摘要:
The piezoelectric lateral-electric-field-excited resonator based on an X-cut lithium niobate plate has been investigated. Two rectangular electrodes were applied on one side of the plate so that the lateral electric field components were parallel to the crystallographic Y-axis and excited the longitudinal wave in the gap between the electrodes. The region around the electrodes was covered with a special absorbing varnish to suppress the spurious oscillations. The effect of the absorbing coating width on the resonant frequency and Q-factor of the lateral field-excited resonator was studied in detail with the series and parallel resonances for different width of the gap between the electrodes. As a result, we found experimentally the parameter regions of pure resonances and the boundaries of value variation for resonance frequency, Q-factor, and effective electromechanical coupling coefficient.
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页码:166 / 172
页数:7
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