The Study of Piezoelectric Lateral-Electric-Field-Excited Resonator

被引:17
作者
Zaitsev, Boris D. [1 ]
Kuznetsova, Iren E. [2 ]
Shikhabudinov, Alexander M. [1 ]
Teplykh, Andrey A. [1 ]
Borodina, Irina A. [1 ]
机构
[1] Russian Acad Sci, Inst Radio Engn & Elect, Saratov Branch, Saratov, Russia
[2] Russian Acad Sci, Inst Radio Engn & Elect, Moscow 103907, Russia
关键词
ACOUSTIC-WAVE SENSOR; LANGASITE; DRIVEN; PLATES;
D O I
10.1109/TUFFC.2014.6689784
中图分类号
O42 [声学];
学科分类号
070206 ; 082403 ;
摘要
The piezoelectric lateral-electric-field-excited resonator based on an X-cut lithium niobate plate has been investigated. Two rectangular electrodes were applied on one side of the plate so that the lateral electric field components were parallel to the crystallographic Y-axis and excited the longitudinal wave in the gap between the electrodes. The region around the electrodes was covered with a special absorbing varnish to suppress the spurious oscillations. The effect of the absorbing coating width on the resonant frequency and Q-factor of the lateral field-excited resonator was studied in detail with the series and parallel resonances for different width of the gap between the electrodes. As a result, we found experimentally the parameter regions of pure resonances and the boundaries of value variation for resonance frequency, Q-factor, and effective electromechanical coupling coefficient.
引用
收藏
页码:166 / 172
页数:7
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