Sputter-Grown Pd-Capped CuO Thin Films for a Highly Sensitive and Selective Hydrogen Gas Sensor

被引:23
作者
Yadav, Prashant [1 ]
Kumar, Ashwani [2 ]
Sanger, Amit [3 ]
Gautam, Yogendra K. [1 ]
Singh, Beer Pal [1 ]
机构
[1] Ch Charan Singh Univ Meerut, Dept Phys, Smart Mat & Sensor Lab, Meerut 250004, UP, India
[2] IIT Roorkee, Inst Instrumentat Ctr, Nanosci Lab, Roorkee 247667, Uttar Pradesh, India
[3] Shriram Inst Ind Res, 19 Univ Rd, New Delhi 110007, India
关键词
Semiconducting metal oxides; CuO thin films; hydrogen sensor; sputtering; FESEM; XPS; SENSING PROPERTIES; ROOM-TEMPERATURE; HIGH RESPONSE; OXIDE; NANOCRYSTALS; MORPHOLOGY; NANOSTRUCTURES; SEMICONDUCTOR; NANOTUBES; H-2;
D O I
10.1007/s11664-020-08588-8
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In the present work, hydrogen gas sensing properties of palladium-capped copper oxide (Pd/CuO) thin films have been investigated. The Pd/CuO thin films were deposited on glass substrate for different deposition times (10-30 min) using direct current magnetron sputtering. The Pd/CuO thin films were characterized by x-ray diffraction, field emission scanning electron microscopy, atomic force microscopy and x-ray photoelectron spectroscopy for their structural, morphological and compositional properties, respectively. The Pd/CuO thin film sensor deposited for 10 min presents a remarkable sensing performance with fast response/recovery time of 10 s/50 s for hydrogen gas at a concentration of (1000 ppm) and optimum operating temperature of 300 degrees C. The sensor is observed to be highly selective towards hydrogen (H-2) gas compared to the other gases such as carbon monoxide (CO) and ammonia (NH3). The sensor is stable under high humidity conditions (60% RH). The studied Pd/CuO thin film sensor can be used to design a simple and low-cost sensor to detect low concentrations of H-2 gas for use in hydrogen-driven industries.
引用
收藏
页码:192 / 200
页数:9
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