High mobility InGaZnO4 thin-film transistors on paper

被引:79
作者
Lim, Wantae [1 ]
Douglas, E. A. [1 ]
Kim, S. -H. [1 ]
Norton, D. P. [1 ]
Pearton, S. J. [1 ]
Ren, F. [2 ]
Shen, H. [3 ]
Chang, W. H. [3 ]
机构
[1] Univ Florida, Dept Mat Sci & Engn, Gainesville, FL 32611 USA
[2] Univ Florida, Dept Chem Engn, Gainesville, FL 32611 USA
[3] USA, Res Lab, Sensors & Electron Devices Directorate, Adelphi, MD 20783 USA
关键词
amorphous semiconductors; gallium compounds; indium compounds; lithography; paper; sputter deposition; thin film transistors; PERFORMANCE; ARRAY;
D O I
10.1063/1.3086394
中图分类号
O59 [应用物理学];
学科分类号
摘要
We report on the fabrication and the electrical properties of amorphous (alpha-)InGaZnO4 thin-film transistors deposited on cellulose paper by sputtering at room temperature. The 150-mu m-thick paper was used as both a gate dielectric and a substrate for device structural support. The transistors on paper were patterned by lithography and operated in enhancement mode with a threshold voltage of 3.75 V, and exhibited saturation mobility, subthreshold gate-voltage swing, and drain current on-to-off ratio of similar to 35 cm(2) V-1 s(-1), 2.4 V decade(-1), and similar to 10(4), respectively. These results verify that simple cellulose paper is a good gate dielectric as well as a low-cost substrate for flexible electronic devices such as paper-based displays.
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页数:3
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