High mobility InGaZnO4 thin-film transistors on paper

被引:81
作者
Lim, Wantae [1 ]
Douglas, E. A. [1 ]
Kim, S. -H. [1 ]
Norton, D. P. [1 ]
Pearton, S. J. [1 ]
Ren, F. [2 ]
Shen, H. [3 ]
Chang, W. H. [3 ]
机构
[1] Univ Florida, Dept Mat Sci & Engn, Gainesville, FL 32611 USA
[2] Univ Florida, Dept Chem Engn, Gainesville, FL 32611 USA
[3] USA, Res Lab, Sensors & Electron Devices Directorate, Adelphi, MD 20783 USA
关键词
amorphous semiconductors; gallium compounds; indium compounds; lithography; paper; sputter deposition; thin film transistors; PERFORMANCE; ARRAY;
D O I
10.1063/1.3086394
中图分类号
O59 [应用物理学];
学科分类号
摘要
We report on the fabrication and the electrical properties of amorphous (alpha-)InGaZnO4 thin-film transistors deposited on cellulose paper by sputtering at room temperature. The 150-mu m-thick paper was used as both a gate dielectric and a substrate for device structural support. The transistors on paper were patterned by lithography and operated in enhancement mode with a threshold voltage of 3.75 V, and exhibited saturation mobility, subthreshold gate-voltage swing, and drain current on-to-off ratio of similar to 35 cm(2) V-1 s(-1), 2.4 V decade(-1), and similar to 10(4), respectively. These results verify that simple cellulose paper is a good gate dielectric as well as a low-cost substrate for flexible electronic devices such as paper-based displays.
引用
收藏
页数:3
相关论文
共 14 条
[1]  
Andersson P, 2002, ADV MATER, V14, P1460, DOI 10.1002/1521-4095(20021016)14:20<1460::AID-ADMA1460>3.0.CO
[2]  
2-S
[3]   A comparison of the performance and stability of ZnO-TFTs with silicon dioxide and nitride as gate insulators [J].
Cross, R. B. M. ;
De Souza, Maria Merlyne ;
Deane, Steve C. ;
Young, Nigel D. .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 2008, 55 (05) :1109-1115
[4]   Impact of aluminum nitride as an insulator on the performance of zinc oxide thin film transistors [J].
De Souza, M. M. ;
Jejurikar, S. ;
Adhi, K. P. .
APPLIED PHYSICS LETTERS, 2008, 92 (09)
[5]   Organic electronics on paper [J].
Eder, F ;
Klauk, H ;
Halik, M ;
Zschieschang, U ;
Schmid, G ;
Dehm, C .
APPLIED PHYSICS LETTERS, 2004, 84 (14) :2673-2675
[6]   High-performance flexible hybrid field-effect transistors based on cellulose fiber paper [J].
Fortunato, Elvira ;
Correia, Nuno ;
Barquinha, Pedro ;
Pereira, Luis ;
Goncalves, Goncalo ;
Martins, Rodrigo .
IEEE ELECTRON DEVICE LETTERS, 2008, 29 (09) :988-990
[7]   Low voltage operating InGaZnO4 thin film transistors using high-k MgO-Ba0.6Sr0.4TiO3 composite gate dielectric on plastic substrate [J].
Kim, Dong Hun ;
Cho, Nam Gyu ;
Kim, Ho-Gi ;
Kim, Hyun-Suk ;
Hong, Jae-Min ;
Kim, Il-Doo .
APPLIED PHYSICS LETTERS, 2008, 93 (03)
[8]   Transparent indium zinc oxide top cathode prepared by plasma damage-free sputtering for top-emitting organic light-emitting diodes [J].
Kim, HK ;
Lee, KS ;
Kwon, JH .
APPLIED PHYSICS LETTERS, 2006, 88 (01)
[9]   Organic TFT array on a paper substrate [J].
Kim, YH ;
Moon, DG ;
Han, JI .
IEEE ELECTRON DEVICE LETTERS, 2004, 25 (10) :702-704
[10]   Bottom-Gate Gallium Indium Zinc Oxide Thin-Film Transistor Array for High-Resolution AMOLED Display [J].
Kwon, Jang Yeon ;
Son, Kyoung Seok ;
Jung, Ji Sim ;
Kim, Tae Sang ;
Ryu, Myung Kwan ;
Park, Kyung Bae ;
Yoo, Byung Wook ;
Kim, Jung Woo ;
Lee, Young Gu ;
Park, Kee Chan ;
Lee, Sang Yoon ;
Kim, Jong Min .
IEEE ELECTRON DEVICE LETTERS, 2008, 29 (12) :1309-1311