The effects of three-dimensional shaping of vertically aligned carbon-nanotube contacts for micro-electro-mechanical switches

被引：9

作者：

Dahmardeh, Masoud ^{[1
]}

Moghaddam, Mehran Vahdani ^{[1
]}

Tee, Min Hian ^{[2
]}

Nojeh, Alireza ^{[1
]}

Takahata, Kenichi ^{[1
]}

机构：

[1] Univ British Columbia, Dept Elect & Comp Engn, Vancouver, BC V6T 1Z4, Canada

[2] Univ British Columbia, Dept Mech Engn, Vancouver, BC V6T 1Z4, Canada

来源：

APPLIED PHYSICS LETTERS | 2013年 / 103卷 / 23期

基金：

加拿大创新基金会; 加拿大自然科学与工程研究理事会;

关键词：

FIELD-EMISSION; ARRAYS; FILMS; FORESTS; GROWTH; DENSIFICATION; DEVICES; ROUTE;

D O I：

10.1063/1.4844695

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A micro-electro-mechanical switch integrated with vertically aligned carbon nanotubes (CNTs) as the contact material is presented. Arrays of the CNTs are three-dimensionally micropatterned using a pulsed micro-discharge process to have tapered contact surfaces with controlled angles, achieving maximized contact areas, while providing contact resistances in the 10 Omega range with an enhanced current capacity. A shape-memory-alloy actuator is integrated to demonstrate stable switching for similar to 1.4 x 10(6) ON-OFF cycles with no sign of damage. The results prove that post-growth micropatterning of CNTs is a promising path to improved and reliable micro contact switches enabled by arrayed CNT contacts for high-power applications. (C) 2013 AIP Publishing LLC.

引用

页数：5

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