共 50 条
[22]
Thermally Actuated MEMS based Silicon Micropump
[J].
PROCEEDINGS OF THE 2012 INTERNATIONAL CONFERENCE ON COMMUNICATIONS, DEVICES AND INTELLIGENT SYSTEMS (CODLS),
2012,
:176-179
[26]
Design and performance Analysis of PDMS Based Micropump
[J].
Transactions on Electrical and Electronic Materials,
2020, 21
:497-502
[27]
Micropump based on temperature dependence of liquid viscosity
[J].
SMART ELECTRONICS AND MEMS,
1997, 3242
:364-371