Comparison of tribological properties of carbon and carbon nitride protective coatings over magnetic media

被引:52
作者
Khurshudov, A
Kato, K
Daisuke, S
机构
[1] Laboratory of Tribology, School of Mechanical Engineering, Tohoku University
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | 1996年 / 14卷 / 05期
关键词
D O I
10.1116/1.580247
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
According to theoretical predictions made in 1989-1990, carbon nitride can be even harder than diamond. Carbon nitride thin films may become a good competitor for diamondlike carbon, which possesses a high hardness, high wear resistance, and low friction coefficient. At present, there are only a few studies on the tribology of CNx coatings. Tribological properties of the deposited by means of ion beam assisted deposition carbon nitride coating (90%C-10%N) were compared with those of commercial carbon coatings at macro- and microscales. CNx coating on a magnetic rigid disk showed both lower macro- and microfriction compared with that of a carbon coating in unlubricated sliding against a silicon nitride pin. The life of the CNx coating was about three to ten times longer than the life of carbon coatings. (C) 1996 American Vacuum Society.
引用
收藏
页码:2935 / 2939
页数:5
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