A Polyimide Based Force Sensor Fabricated Using Additive Screen-Printing Process for Flexible Electronics

被引:36
作者
Maddipatla, Dinesh [1 ]
Zhang, Xingzhe [1 ]
Bose, Arnesh K. [1 ]
Masihi, Simin [1 ]
Narakathu, Binu B. [1 ]
Bazuin, Bradley J. [1 ]
Williams, John D. [2 ]
Mitchell, Michael F. [2 ]
Atashbar, Massood Z. [1 ]
机构
[1] Western Michigan Univ, Dept Elect & Comp Engn, Kalamazoo, MI 49006 USA
[2] Boeing Co, Boeing Res & Technol, Addit Elect Technol AET Grp, Huntsville, AL 35824 USA
基金
美国国家科学基金会;
关键词
Force sensors; Sensors; Polyimides; Dielectrics; Electrodes; Capacitance; Force; Additive screen-printing process; capacitive based pressure sensor; polyimide substrate; PDMS dielectric layer; flexible; PRESSURE SENSORS; ELECTROCHEMICAL SENSOR; SELECTIVE DETECTION; SKIN;
D O I
10.1109/ACCESS.2020.3037703
中图分类号
TP [自动化技术、计算机技术];
学科分类号
0812 ;
摘要
A flexible capacitive force sensor was developed for force sensing applications. The force sensor consists of two electrodes and a dielectric layer. The electrodes were fabricated by depositing conductive silver (Ag) ink on a flexible polyimide platform using screen-printing process. The dielectric layer was prepared by mixing the contents of polydimethylsiloxane (PDMS) (pre-polymer and curing agent) in a 16:1 ratio. Then the PDMS dielectric layer was sandwiched between the screen-printed Ag electrodes. The capability of the fabricated force sensor was investigated by recording its capacitive response for varying applied forces of 100 N. It was observed that the capacitance increased from 5.83 pF to 6.36 pF as the force was increased from 0 N (no load) to 100 N. A sensitivity and correlation coefficient of 0.081%N-1 and 0.998 were calculated for the force sensor. In addition, a response time and recovery time of 3.7 seconds and 5.7 seconds was measured for the fabricated force sensor. The relative humidity (% RH) tests performed from 20% RH to 80% RH, in steps of 20% RH, revealed that there was a minimal effect of RH on the base capacitance of the force sensor at room temperature.
引用
收藏
页码:207813 / 207821
页数:9
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