A Polyimide Based Force Sensor Fabricated Using Additive Screen-Printing Process for Flexible Electronics

被引：36

作者：

Maddipatla, Dinesh ^{[1
]}

Zhang, Xingzhe ^{[1
]}

Bose, Arnesh K. ^{[1
]}

Masihi, Simin ^{[1
]}

Narakathu, Binu B. ^{[1
]}

Bazuin, Bradley J. ^{[1
]}

Williams, John D. ^{[2
]}

Mitchell, Michael F. ^{[2
]}

Atashbar, Massood Z. ^{[1
]}

机构：

[1] Western Michigan Univ, Dept Elect & Comp Engn, Kalamazoo, MI 49006 USA

[2] Boeing Co, Boeing Res & Technol, Addit Elect Technol AET Grp, Huntsville, AL 35824 USA

来源：

IEEE ACCESS | 2020年 / 8卷

基金：

美国国家科学基金会;

关键词：

Force sensors; Sensors; Polyimides; Dielectrics; Electrodes; Capacitance; Force; Additive screen-printing process; capacitive based pressure sensor; polyimide substrate; PDMS dielectric layer; flexible; PRESSURE SENSORS; ELECTROCHEMICAL SENSOR; SELECTIVE DETECTION; SKIN;

D O I：

10.1109/ACCESS.2020.3037703

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

A flexible capacitive force sensor was developed for force sensing applications. The force sensor consists of two electrodes and a dielectric layer. The electrodes were fabricated by depositing conductive silver (Ag) ink on a flexible polyimide platform using screen-printing process. The dielectric layer was prepared by mixing the contents of polydimethylsiloxane (PDMS) (pre-polymer and curing agent) in a 16:1 ratio. Then the PDMS dielectric layer was sandwiched between the screen-printed Ag electrodes. The capability of the fabricated force sensor was investigated by recording its capacitive response for varying applied forces of 100 N. It was observed that the capacitance increased from 5.83 pF to 6.36 pF as the force was increased from 0 N (no load) to 100 N. A sensitivity and correlation coefficient of 0.081%N-1 and 0.998 were calculated for the force sensor. In addition, a response time and recovery time of 3.7 seconds and 5.7 seconds was measured for the fabricated force sensor. The relative humidity (% RH) tests performed from 20% RH to 80% RH, in steps of 20% RH, revealed that there was a minimal effect of RH on the base capacitance of the force sensor at room temperature.

引用

页码：207813 / 207821

页数：9

共 52 条

[1]

Ali MM, 2016, IEEE SENSOR

[2] Printed strain sensor based on silver nanowireisilver flake composite on flexible and stretchable TPU substrate [J].

Ali, Mohammed Mohammed ;

Maddipatla, Dinesh ;

Narakathu, Binu Baby ;

Chlaihawi, Amer Abdulmahdi ;

Emamian, Sepehr ;

Janabi, Farah ;

Bazuin, Bradley J. ;

Atashbar, Massood Z. .

SENSORS AND ACTUATORS A-PHYSICAL, 2018, 274 :109-115

[3] Flexible Capacitive Pressure Sensor Based on PDMS Substrate and Ga-In Liquid Metal [J].

Ali, Sam ;

Maddipatla, Dinesh ;

Narakathu, Binu Baby ;

Chlaihawi, Amer A. ;

Emamian, Sepehr ;

Janabi, Farah ;

Bazuin, Bradley J. ;

Atashbar, Massood Z. .

IEEE SENSORS JOURNAL, 2019, 19 (01) :97-104

[4] Impact of Substrate and Process on the Electrical Performance of Screen-Printed Nickel Electrodes: Fundamental Mechanism of Ink Film Roughness [J].

Altay, Bilge Nazli ;

Jourdan, Jerome ;

Turkani, Vikram S. ;

Dietsch, Herve ;

Maddipatla, Dinesh ;

Pekarovicova, Alexandra ;

Fleming, Paul D. ;

Atashbar, Massood .

ACS APPLIED ENERGY MATERIALS, 2018, 1 (12) :7164-+

[5]

[Anonymous], 2004, SPRINGER HDB NANOTEC, DOI DOI 10.1007/3-540-29838-X_5

[6] A Screen Printed Phenanthroline-Based Flexible Electrochemical Sensor for Selective Detection of Toxic Heavy Metal Ions [J].

Avuthu, Sai Guruva Reddy ;

Wabeke, Jared Thomas ;

Narakathu, Binu Baby ;

Maddipatla, Dinesh ;

Arachchilage, Jaliya Samarakoon ;

Obare, Sherine O. ;

Atashbar, Massood Z. .

IEEE SENSORS JOURNAL, 2016, 16 (24) :8678-8684

[7]

Avuthu SGR, 2015, IEEE SENSOR, P490

[8] 25th Anniversary Article: A Soft Future: From Robots and Sensor Skin to Energy Harvesters [J].

Bauer, Siegfried ;

Bauer-Gogonea, Simona ;

Graz, Ingrid ;

Kaltenbrunner, Martin ;

Keplinger, Christoph ;

Schwoediauer, Reinhard .

ADVANCED MATERIALS, 2014, 26 (01) :149-162

[9]

Chang J., 2010, 2010 23rd International Vacuum Nanoelectronics Conference (IVNC), P215, DOI 10.1109/IVNC.2010.5563229

[10] Demonstration for integrating capacitive pressure sensors with read-out circuitry on stainless steel substrate [J].

Chang, SP ;

Allen, MG .

SENSORS AND ACTUATORS A-PHYSICAL, 2004, 116 (02) :195-204

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