Simulation on Effects of Electrical Loading due to Interdigital Transducers in Surface Acoustic Wave Resonator

被引：12

作者：

Namdeo, Ashish Kumar ^{[1
]}

Nemade, Harshal B. ^{[1
]}

机构：

[1] Indian Inst Technol Guwahati, Dept Elect & Elect Engn, Gauhati 781039, India

来源：

INTERNATIONAL CONFERENCE ON DESIGN AND MANUFACTURING (ICONDM2013) | 2013年 / 64卷

关键词：

FEM; IDT; MEMS; SAW Devices; SAW Resonator; SAW Velocity; METAL STRIPS;

D O I：

10.1016/j.proeng.2013.09.104

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper investigates the effects of electrical loading due to metallic interdigital transducer (IDT) on surface acoustic wave (SAW) velocity in SAW resonators by simulation using ELM in COMSOL Multiphysics. The IDT electrodes fabricated over the piezo-substrate short circuit the parallel electric field associated with SAW under the IDT during wave propagation and affect the SAW phase velocity. The simulation considers a SAW resonator with massless infinite number of IDT fingers on Y-Z cut lithium niobate substrate. The changes in resonance frequency and SAW phase velocity of SAW resonator due to electrical loading are studied for various metallization ratios. The electric field distribution at the surface of piezo-substrate is obtained and it is observed that the short circuit of the electric field due to metallic IDT reduces the SAW phase velocity; consequently; the resonance frequency of the SAW device decreases. (C) 2013 The Authors. Published by Elsevier Ltd.

引用

页码：322 / 329

页数：8

共 18 条

[1] Characterization of multi- and single-layer structure SAW sensor [J].

Ahmadi, S ;

Hassani, F ;

Korman, C ;

Rahaman, M ;

Zaghloul, M .

PROCEEDINGS OF THE IEEE SENSORS 2004, VOLS 1-3, 2004, :1129-1132

[2]

BaghaiWadji AR, 1995, ULTRASON, P227, DOI 10.1109/ULTSYM.1995.495573

[3] ACOUSTIC SURFACE-WAVES IN PIEZOELECTRIC MATERIALS WITH PERIODIC METAL STRIPS ON SURFACE [J].

BLOTEKJAER, K ;

INGEBRIGTSEN, KA ;

SKEIE, H .

IEEE TRANSACTIONS ON ELECTRON DEVICES, 1973, ED20 (12) :1139-1146

[4] METHOD FOR ANALYZING WAVES IN STRUCTURES CONSISTING OF METAL STRIPS ON DISPERSIVE MEDIA [J].

BLOTEKJAER, K ;

INGEBRIGTSEN, KA ;

SKEIE, H .

IEEE TRANSACTIONS ON ELECTRON DEVICES, 1973, ED20 (12) :1133-1138

[5] Simulation of short LSAW transducers including electrode mass loading and finite finger resistance [J].

Gamble, KJ ;

Malocha, DC .

IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 2002, 49 (01) :47-56

[6]

Gardner J.W., 2002, MICROSENSORS MEMS SM

[7]

Hamidon M. N., 2009, P WORLD C ENG, P1

[8]

Hemphill R. B., 1972, IEEE ULTR S, P340

[9] FINITE ELEMENT MODELING OF ELECTRODE MASS LOADING EFFECTS IN LONGITUDINAL LEAKY SAW RESONATORS [J].

Klymyshyn, David M. ;

Kannan, Thirumalai ;

Kachayev, Anton .

MICROWAVE AND OPTICAL TECHNOLOGY LETTERS, 2009, 51 (02) :390-395

[10]

Morgan D., 2010, Surface Acoustic Wave Filters: With Applications to Electronic Communications and Signal Processing

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