Nanoporous silica as an ultralow-k dielectric

被引：124
作者：
Jin, CM
Luttmer, JD
Smith, DM
Ramos, TA
机构：
来源：
MRS BULLETIN | 1997年 / 22卷 / 10期
关键词：
D O I：
10.1557/S0883769400034187
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
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页码：39 / 42
页数：4
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