Equivalent circuit of radio frequency-plasma with the transformer model

被引：15

作者：

Nishida, K. ^{[1
]}

Mochizuki, S. ^{[1
]}

Ohta, M. ^{[1
]}

Yasumoto, M. ^{[1
]}

Lettry, J. ^{[2
]}

Mattei, S. ^{[2
]}

Hatayama, A. ^{[1
]}

机构：

[1] Keio Univ, Kohoku Ku, Yokohama, Kanagawa 2238522, Japan

[2] CERN Rte Meyrin, CH-1200 Geneva, Switzerland

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 2014年 / 85卷 / 02期

关键词：

D O I：

10.1063/1.4832060

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

LINAC4 H- source is radio frequency (RF) driven type source. In the RF system, it is required to match the load impedance, which includes H- source, to that of final amplifier. We model RF plasma inside the H- source as circuit elements using transformer model so that characteristics of the load impedance become calculable. It has been shown that the modeling based on the transformer model works well to predict the resistance and inductance of the plasma. (C) 2013 AIP Publishing LLC.

引用

页数：3

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