Increasing the Interferogram Sensitivity by Digital Holography

被引：1

作者：

Balbekin, N. S. ^{[1
]}

Venediktov, V. Yu ^{[2
,3
]}

Venediktov, D. V. ^{[1
]}

Petrov, N., V ^{[1
]}

Konovalov, R. S. ^{[2
]}

Pul'kin, S. A. ^{[3
]}

Sevryugin, A. A. ^{[2
]}

Tursunov, I ^{[2
]}

Shoev, V., I ^{[1
]}

机构：

[1] ITMO Univ, St Petersburg 197101, Russia

[2] St Petersburg Electrotech Univ LETI, St Petersburg 197376, Russia

[3] St Petersburg Univ, St Petersburg 199034, Russia

来源：

OPTOELECTRONICS INSTRUMENTATION AND DATA PROCESSING | 2020年 / 56卷 / 02期

关键词：

spatial light modulator; hologram; Rozhdestvenskii hooks; holographic interferometry; distortion correction; amplification of interferograms; nanometrology;

D O I：

10.3103/S8756699020020028

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

This paper presents the results of experimental studies and digital methods for recording of holograms using spatial light modulators. The use of holographic interference methods for measuring nanoscale irregularities is described for the case of a nanostep (70 nm in height and 30 mu m in width). Examples are given of the method of increased sensitivity for nanostep measurements and the method of hooks using a digital technique. Correction of internal system distortions in the interferometer has been shown to be a workable method. The holographic interference methods with digital processing of holograms allows the sensitivity of interferograms to be increased without loss of basic information about the object and without increasing the measurement accuracy.

引用

页码：190 / 197

页数：8

共 13 条

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