Accurate and precise dew-point control system based on active pressure control in two-pressure humidity generator

被引：5

作者：

Ishiwata, Naoya ^{[1
]}

Niwa, Tamio ^{[1
]}

Abe, Hisashi ^{[1
]}

机构：

[1] AIST, NMIJ, Tsukuba Cent 3, Tsukuba, Ibaraki 3058563, Japan

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 2019年 / 90卷 / 07期

关键词：

D O I：

10.1063/1.5099191

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

We developed an accurate and precise system for controlling dew points by using an active pressure control system in a primary standard humidity generator. By using this system, an adjustment capability to a target value of 0.0008 degrees C was attained for dew-point generation, compared with the previous value of approximately 0.01 degrees C. In a two-pressure humidity generator, the drift in the dew point with time owing to a rapid drop in the water level in the presaturator and to fluctuations in atmospheric pressure was greatly suppressed. The standard deviation of the dew point obtained with our dew-point control system was 10 times smaller than the drift observed in the absence of the system. This dew-point control system makes it possible to calibrate humidity sensors at target values with greater efficiency.

引用

页数：3