Accurate and precise dew-point control system based on active pressure control in two-pressure humidity generator

被引:5
|
作者
Ishiwata, Naoya [1 ]
Niwa, Tamio [1 ]
Abe, Hisashi [1 ]
机构
[1] AIST, NMIJ, Tsukuba Cent 3, Tsukuba, Ibaraki 3058563, Japan
来源
REVIEW OF SCIENTIFIC INSTRUMENTS | 2019年 / 90卷 / 07期
关键词
3;
D O I
10.1063/1.5099191
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
We developed an accurate and precise system for controlling dew points by using an active pressure control system in a primary standard humidity generator. By using this system, an adjustment capability to a target value of 0.0008 degrees C was attained for dew-point generation, compared with the previous value of approximately 0.01 degrees C. In a two-pressure humidity generator, the drift in the dew point with time owing to a rapid drop in the water level in the presaturator and to fluctuations in atmospheric pressure was greatly suppressed. The standard deviation of the dew point obtained with our dew-point control system was 10 times smaller than the drift observed in the absence of the system. This dew-point control system makes it possible to calibrate humidity sensors at target values with greater efficiency.
引用
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页数:3
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