Femtosecond Laser Nanomachining Applications in Fused Silica

被引:0
|
作者
Taylor, Rod S. [1 ]
Hnatovsky, Cyril [1 ]
Simova, Eli [1 ]
Pattathil, Rajeev [1 ]
Liu, Jiaren [1 ]
Rayner, David M. [1 ]
Corkum, Paul B. [1 ]
机构
[1] Natl Res Council Canada, Ottawa, ON K1A 0R6, Canada
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中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Focused femtosecond laser light can produce beautifully arrayed self-organized nanocracks inside fused silica. These nanocracks provide a unique capability for nanomachining micro- and nanofluidic channels, nanoporous capillaries and rewritable data storage elements. (C)2007 Optical Society of America
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页码:1165 / 1166
页数:2
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