Optical frequency-domain imaging microprofilometry with a frequency-tunable liquid-crystal Fabry-Perot etalon device

被引：29

作者：

Kinoshita, N

Takeda, M

Yago, H

Watanabe, Y

Kurokawa, T

机构：

[1] Univ Electrocommun, Dept Commun & Syst Engn, Chofu, Tokyo 1828585, Japan

[2] Yazaki Corp, Res & Dev Ctr, Shizuoka 41011, Japan

[3] NTT, Optoelect Labs, Atsugi, Kanagawa 24301, Japan

[4] Univ Electrocommun, Dept Informat & Commun Engn, Chofu, Tokyo 1828585, Japan

[5] Opto Wave Lab Inc, Yokosuka, Kanagawa 2390847, Japan

[6] Tokyo Univ Agr & Technol, Dept Elect & Elect Engn, Tokyo 1848588, Japan

来源：

APPLIED OPTICS | 1999年 / 38卷 / 34期

关键词：

D O I：

10.1364/AO.38.007063

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

An optical frequency-domain interference microscope with a liquid-crystal Fabry-Perot interferometer as an optical frequency-scan device was developed for microscopic three-dimensional shape measurements. The proposed system can perform absolute measurement of the discontinuous surface profile of a microscopic object without use of mechanically moving components such as a piezoelectric transducer or a grating spectrometer. Experimental results are presented that demonstrate the validity of the principle. (C) 1999 Optical Society of America OCIS codes: 120.3180, 120.2830, 120.3930, 120.2230, 120.3940, 120.2650.

引用

页码：7063 / 7068

页数：6

共 12 条

[1]

Barnes TH, 1996, OPTIK, V103, P93

[2] 3-DIMENSIONAL SENSING OF ROUGH SURFACES BY COHERENCE RADAR [J].