STUDY OF ADSORPTION PROPERTIES OF NANOSTRUCTURED FILMS BASED ON TIN DIOXIDE

被引：2

作者：

Sigaev, A. P. ^{[1
]}

Averin, I. A. ^{[1
]}

Karmanov, A. A. ^{[1
]}

Pronin, I. A. ^{[1
]}

Yakushova, N. D. ^{[1
]}

机构：

[1] Penza State Univ, Dept Nano & Microelect, Penza, Russia

来源：

PHYSICAL AND CHEMICAL ASPECTS OF THE STUDY OF CLUSTERS NANOSTRUCTURES AND NANOMATERIALS | 2020年 / 12期

关键词：

sol-gel technology; films; mixed oxides; IR-Fourier spectroscopy; the adsorption centers; spectrophotometry; indicator method of a distribution of adsorption centers; plasma treatment; ZNO;

D O I：

10.26456/pcascnn/2020.12.162

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

The results of theoretical and experimental studies of surface properties of nanostructured films based on tin dioxide using Fourier-transform infrared spectroscopy, ellipsometry and the indicator method of the distribution of adsorption centers are presented. Etching in inductively coupled plasma was used for additional post-processing of nanostructured films in order to activate the adsorption centers.

引用

页码：162 / 169

页数：8

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