Computation of 3D MEMS electrostatics using a nearly exact BEM solver

被引：22

作者：

Muhkopadhyay, S. ^{[1
]}

Majumdar, N. ^{[1
]}

机构：

[1] Saha Inst Nucl Phys, Kolkata 700064, W Bengal, India

来源：

ENGINEERING ANALYSIS WITH BOUNDARY ELEMENTS | 2006年 / 30卷 / 08期

关键词：

boundary element method; Green function; electrostatics; MEMS; thin plates;

D O I：

10.1016/j.enganabound.2006.03.002

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The electrostatic properties of thin plate shaped structures relevant to the micro-electro-mechanical systems (MEMS) have been computed using a nearly exact boundary element method (BEM) solver. The solver uses closed form expressions for three-dimensional potential and force fields due to uniform sources/sinks distributed on finite flat surfaces. The expressions have been validated and, being analytical, have been found to be applicable throughout the physical domain. The solver has been applied to compute accurately and efficiently the charge densities on thin plate shaped conductors as used in MEMS components. We have presented results for the model problem of parallel plate capacitors and compared them with results obtained from several other BEM based solvers. (C) 2006 Elsevier Ltd. All rights reserved.

引用

页码：687 / 696

页数：10

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