Enhanced cold field emission from 100 oriented β-W nanoemitters

被引：43
作者：
Singh, JP [1 ]
Tang, F [1 ]
Karabacak, T [1 ]
Lu, TM [1 ]
Wang, GC [1 ]
机构：
[1] Rensselaer Polytech Inst, Dept Phys Appl Phys & Astron, Troy, NY 12180 USA
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 2004年 / 22卷 / 03期
关键词：
D O I：
10.1116/1.1736642
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Well-aligned beta-phase W(100) nanorods having square-base pyramidal apexes were grown on oxidized Si(100) substrate using glancing angle deposition technique with substrate rotation. The field emission characteristics of nanorods were measured using scanning tunneling microscope (STM) tip as an extraction anode. A highly confined emission current of about 23 muA was obtained at a low extraction voltage of similar to260 V at similar to280 nm anode-cathode distance with 3% fluctuations over similar to2 h. The Fowler-Nordheim plot of the field emission characteristics of nanorods is nonlinear compared with the linear behavior from a conventional W film. The STM topography after the field emission showed a type of nanolips structure grown over the pyramidal apex, which was suggested to enhance and stabilize the emission current. (C) 2004 American Vacuum Society.
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收藏
页码：1048 / 1051
页数：4
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