Fabrication of iron-nickel alloy microcomponents by centrifuge-assisted micromolding

被引:2
作者
Zhou, Han [1 ,2 ]
Su, Bo [1 ,3 ]
Guo, Tieming [2 ]
Meng, Junhu [1 ]
机构
[1] Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China
[2] Lanzhou Univ Technol, Sch Mat Sci & Engn, Lanzhou 730050, Peoples R China
[3] Univ Chinese Acad Sci, Beijing 100039, Peoples R China
基金
中国国家自然科学基金;
关键词
Iron-nickel alloy; Microcomponents; Centrifuge-assisted micromolding; Linear shrinkage; Microhardness; Surface roughness; MICRO PARTS; ALUMINA; METAL; MICROFABRICATION; SOFTLITHOGRAPHY; REPLICATION; SUSPENSIONS; CERAMICS; WATER;
D O I
10.1007/s00170-015-7407-5
中图分类号
TP [自动化技术、计算机技术];
学科分类号
0812 ;
摘要
Iron-nickel alloys exhibit lots of attractive properties, such as magnetic and conductivity properties, as well as excellent corrosion resistance. These properties make them suitable for making microcomponents. This paper presents the fabrication of iron-nickel alloy microcomponents (microchannel, microwell, micromixer, and microgear) from an ethanol-based composite slurry by centrifuge-assisted micromolding. Polydimethylsiloxane (PDMS) molds were replicated from microstructured silicon masters. A stable ethanol-based iron-nickel composite slurry with a high solid content of 85 wt% was prepared and filled into the PDMS molds by the aid of centrifugation. After drying, green microcomponents were demolded and followed by sintering in hydrogen atmosphere. Sintering profile was established by TGA. The green and sintered microcomponents had good shape retention and were free of cracks. The highest density of the microcomponents (97.3 RD%) was achieved at 1070 degrees C; the corresponding microhardness and Young's modulus were 167.8 HV and 175.4 GPa, respectively. The linear shrinkage increased with sintering temperature and the maximum value was about 12.5 %.
引用
收藏
页码:839 / 846
页数:8
相关论文
共 30 条
  • [1] Process mechanism for vacuum-assisted microfluidic lithography with ceramic colloidal suspensions
    Ahn, Sung-Jin
    Min, Ji-Hyun
    Kim, Joosun
    Moon, Jooho
    [J]. JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 2008, 91 (07) : 2143 - 2149
  • [2] Manufacturing of micro thin-walled metal parts by micro-droplet deposition
    Chao, Yan-pu
    Qi, Le-hua
    Xiao, Yuan
    Luo, Jun
    Zhou, Ji-ming
    [J]. JOURNAL OF MATERIALS PROCESSING TECHNOLOGY, 2012, 212 (02) : 484 - 491
  • [3] Elisa V, 2010, INT J ADV MANUF TECH, V51, P945
  • [4] Study of the demolding process - implications for thermal stress, adhesion and friction control
    Guo, Yuhua
    Liu, Gang
    Xiong, Yin
    Tian, Yangchao
    [J]. JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2007, 17 (01) : 9 - 19
  • [5] Alumina composite suspension preparation for softlithography microfabrication
    Hassanin, H.
    Jiang, K.
    [J]. MICROELECTRONIC ENGINEERING, 2009, 86 (4-6) : 929 - 932
  • [6] ALUMINA OF HIGH-RELIABILITY BY CENTRIFUGAL CASTING
    HUISMAN, W
    GRAULE, T
    GAUCKLER, LJ
    [J]. JOURNAL OF THE EUROPEAN CERAMIC SOCIETY, 1995, 15 (09) : 811 - 821
  • [7] Fabrication of 316-L stainless steel micro parts by softlithography and powder metallurgy
    Imbaby, Mohamed
    Jiang, Kyle
    Chang, Isaac
    [J]. MATERIALS LETTERS, 2008, 62 (26) : 4213 - 4216
  • [8] Fabrication of micro-features and micro-tools using electrochemical micromachining
    Jain, V. K.
    Kalia, Subodh
    Sidpara, Ajay
    Kulkarni, V. N.
    [J]. INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY, 2012, 61 (9-12) : 1175 - 1183
  • [9] Iron nanoparticles dispersible in both ethanol and water for direct silica coating
    Leng, Yonghua
    Sato, Kimitoshi
    Li, Ji-Guang
    Ishigaki, Takamasa
    Iijima, Motoyuki
    Kamiya, Hidehiro
    Yoshida, Takayuki
    [J]. POWDER TECHNOLOGY, 2009, 196 (01) : 80 - 84
  • [10] Magnetic bead micromixer: Influence of magnetic element geometry and field amplitude
    Lund-Olesen, Torsten
    Buus, Bjarke B.
    Howalt, Jakob G.
    Hansen, Mikkel F.
    [J]. JOURNAL OF APPLIED PHYSICS, 2008, 103 (07)