Direct synthesis of highly textured Ge on flexible polyimide films by metal-induced crystallization

被引:20
作者
Oya, N. [1 ]
Toko, K. [1 ]
Saitoh, N. [2 ]
Yoshizawa, N. [2 ]
Suemasu, T. [1 ]
机构
[1] Univ Tsukuba, Inst Appl Phys, Tsukuba, Ibaraki 3058573, Japan
[2] AIST, TIA, Electron Microscope Facil, Tsukuba, Ibaraki 3058569, Japan
关键词
ALUMINUM-INDUCED CRYSTALLIZATION; THIN-FILM; POLYCRYSTALLINE GERMANIUM; AMORPHOUS-GERMANIUM; LAYER EXCHANGE; GROWTH; TEMPERATURE; GLASS;
D O I
10.1063/1.4887236
中图分类号
O59 [应用物理学];
学科分类号
摘要
The highly (111)-textured Ge thin film (50-nm thickness) is demonstrated on a flexible polyimide film via the low-temperature crystallization (325 degrees C) of amorphous Ge using Al as a catalyst. Covering the polyimide with insulators significantly improved the crystal quality of the resulting Ge layer. In particular, SiN covering led to 97% (111)-oriented Ge with grains 200 mu m in size, two orders larger than the grain size of polycrystalline Ge directly formed on the polyimide film. This achievement will give a way to realize advanced electronic and optical devices simultaneously allowing for high performance, inexpensiveness, and flexibility. (C) 2014 AIP Publishing LLC.
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页数:4
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