Transmission electron microscopy specimen preparation perpendicular to the long axis of high aspect ratio features

被引：4

作者：

Irwin, R. B. ^{[1
]}

Anciso, A. ^{[1
]}

Jones, P. J. ^{[1
]}

Glenn, A. L. ^{[2
]}

Williams, B. L. ^{[3
]}

Sridhar, S. ^{[3
]}

Arshad, S. ^{[4
]}

机构：

[1] Texas Instruments Inc, TT PEG PFA Lab, Dallas, TX 75243 USA

[2] Texas Instruments Inc, MAKE Proc Characterizat Lab, Dallas, TX 75243 USA

[3] Texas Instruments Inc, Analog Technol Dev, Dallas, TX 75243 USA

[4] Texas Instruments Inc, DFAB Prod Engn, Dallas, TX 75243 USA

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | 2009年 / 27卷 / 06期

关键词：

LIFT-OUT; ION;

D O I：

10.1116/1.3248271

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

A new variation of transmission electron microscopy (TEM) specimen preparation is introduced. By thinning a tall high aspect ratio structure perpendicular to the long dimension (i.e., from the side) rather than from perpendicular to the short dimension (either the top or the bottom), it is possible to obtain a more uniformly thin TEM specimen over the entire long dimension of the structure. This article will describe the rational for this variation in specimen preparation. The necessary modifications of four different specimen preparation methods (in situ lift-out, traditional H-bar, ex situ lift-out, and tripod polishing) will be discussed and images of specimens obtained by both of these first two methods will be shown. Additional potential advantages and other applications of this specimen preparation method will be covered. (C) 2009 American Vacuum Society. [DOI: 10.1116/1.3248271]

引用

页码：1352 / 1359

页数：8

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