Spectroscopic ellipsometric analysis of interfaces: Comparison of alloy and effective-medium-approximation approaches to a CdMgTe multilayer system

被引：6

作者：

Ghong, TH ^{[1
]}

Kim, TJ

Kim, YD

Aspnes, DE

机构：

[1] Kyung Hee Univ, Dept Phys, Seoul 130701, South Korea

[2] Kyung Hee Univ, Res Inst Informat Display, Seoul 130701, South Korea

[3] N Carolina State Univ, Dept Phys, Raleigh, NC 27695 USA

来源：

APPLIED PHYSICS LETTERS | 2004年 / 85卷 / 06期

关键词：

D O I：

10.1063/1.1779965

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We discuss the accuracy and detectability of interface layers in the analysis of ellipsometric spectra in the CdxMg1-xTe system. Using parametric-alloy and effective-medium-approximation (EMA) representations to simulate interfaces in a single-quantum-well structure, we show that EMA analysis overestimates thicknesses of alloy interfaces by more than a factor of 3. While detailed results will clearly depend on the nature of the epitaxial materials involved, the results suggest that analyses of interfaces by the EMA should be done with caution. (C) 2004 American Institute of Physics.

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页码：946 / 948

页数：3

相关论文

共 15 条

[1] OPTICAL-PROPERTIES OF CDTE - EXPERIMENTAL AND MODELING [J].

ADACHI, S ;

KIMURA, T ;

SUZUKI, N .

JOURNAL OF APPLIED PHYSICS, 1993, 74 (05) :3435-3441

[2] MICROSTRUCTURAL EVOLUTION OF ULTRATHIN AMORPHOUS-SILICON FILMS BY REAL-TIME SPECTROSCOPIC ELLIPSOMETRY [J].

AN, I ;

NGUYEN, HV ;

NGUYEN, NV ;

COLLINS, RW .

PHYSICAL REVIEW LETTERS, 1990, 65 (18) :2274-2277

[3] INVESTIGATION OF EFFECTIVE-MEDIUM MODELS OF MICROSCOPIC SURFACE-ROUGHNESS BY SPECTROSCOPIC ELLIPSOMETRY [J].

ASPNES, DE ;

THEETEN, JB .

PHYSICAL REVIEW B, 1979, 20 (08) :3292-3302

[4] OPTICAL-PROPERTIES OF THIN-FILMS [J].

ASPNES, DE .

THIN SOLID FILMS, 1982, 89 (03) :249-262

[5]

AZZAM RM, 1977, ELLIPSOMETRY POLARIZ, P273

[6] SPECTRO-ELLIPSOMETRY CHARACTERIZATION OF OPTICAL-QUALITY VAPOR-DEPOSITED DIAMOND THIN-FILMS [J].

CONG, Y ;

COLLINS, RW ;

EPPS, GF ;

WINDISCHMANN, H .

APPLIED PHYSICS LETTERS, 1991, 58 (08) :819-821

[7] APPLICATION OF SPECTROSCOPIC ELLIPSOMETRY TO COMPLEX SAMPLES [J].

FREEOUF, JL .

APPLIED PHYSICS LETTERS, 1988, 53 (24) :2426-2428

[8] Parametric modeling of the dielectric functions of Cd1-xMgxTe alloy films [J].

Ihn, YS ;

Kim, TJ ;

Ghong, TH ;

Kim, YD ;

Aspnes, DE ;

Kossut, J .

THIN SOLID FILMS, 2004, 455 :222-227

[9] Optical properties of Cd1-xMgxTe (x=0.00, 0.23, 0.31, and 0.43) alloy films [J].

Ihn, YS ;

Kim, TJ ;

Kim, YD ;

Aspnes, DE ;

Kossut, J .

APPLIED PHYSICS LETTERS, 2004, 84 (05) :693-695

[10] Development of a parametric optical constant model for Hg1-xCdxTe for control of composition by spectroscopic ellipsometry during MBE growth [J].

Johs, B ;

Herzinger, CM ;

Dinan, JH ;

Cornfeld, A ;

Benson, JD .

THIN SOLID FILMS, 1998, 313 :137-142