The past, present and future of high-k/metal gates

被引：23

作者：

Choi, Kisik ^{[1
]}

Ando, Takashi ^{[2
]}

Cartier, Eduard ^{[2
]}

Kerber, Andreas ^{[1
]}

Paruchuri, Vamsi ^{[3
]}

Iacoponi, John ^{[1
]}

Narayanan, Vijay ^{[2
]}

机构：

[1] IBM Albany NanoTech Ctr, GLOBALFOUNDRIES, Albany, NY 12203 USA

[2] IBM TJ Watson Res Ctr, Yorktown Hts, NY 10598 USA

[3] IBM Albany NanoTech Ctr, Albany, NY 12203 USA

来源：

SILICON COMPATIBLE MATERIALS, PROCESSES, AND TECHNOLOGIES FOR ADVANCED INTEGRATED CIRCUITS AND EMERGING APPLICATIONS 3 | 2013年 / 53卷 / 03期

关键词：

INTERFACE;

D O I：

10.1149/05303.0017ecst

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

Like other technology components of the semiconductor industry, the high-k/metal gate has also continued innovation since its introduction to the 45 nm node. In order to fulfill the ever-increasing power/performance requirements for the future devices, new device architectures are being introduced and the high-k/metal gate should evolve in accordance. In this paper, the development history of the high-k/metal gate stack will be reviewed and the qualities required for the high-k/metal gate stack to match with the future devices will be discussed.

引用

页码：17 / 26

页数：10

共 35 条

[1]

Ando T., 2011, SISC 2011

[2]

[Anonymous], VLSI S

[3]

[Anonymous], IEDM

[4]

[Anonymous], [No title captured]

[5]

Auth C., 2012, 2012 IEEE Symposium on VLSI Technology, P131, DOI 10.1109/VLSIT.2012.6242496

[6]

Bersuker G., 2010, IEEE TED, V57

[7]

Bohr M., 2011, INT ELECT DEVICES M, p1.1.1, DOI DOI 10.1109/IEDM.2011.6131469

[8] Voltage Ramp Stress Based Stress-And-Sense Test Method For Reliability Characterization Of Hf-Base High-k/Metal Gate Stacks For CMOS Technologies [J].

Cartier, E. ;

Kerber, A. ;

Krishnan, S. ;

Linder, B. ;

Ando, T. ;

Frank, M. M. ;

Choi, K. ;

Narayanan, V. .

PHYSICS AND TECHNOLOGY OF HIGH-K MATERIALS 9, 2011, 41 (03) :337-348

[9]

Cartier E, 2009, 2009 SYMPOSIUM ON VLSI TECHNOLOGY, DIGEST OF TECHNICAL PAPERS, P42

[10]

Choi K., 2009, VLSI S, P138

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