Architecture and applications of a high resolution gated SPAD image sensor

被引:94
作者
Burri, Samuel [1 ]
Maruyama, Yuki [2 ]
Michalet, Xavier [3 ]
Regazzoni, Francesco [4 ]
Bruschini, Claudio [1 ]
Charbon, Edoardo [2 ]
机构
[1] Swiss Fed Inst Technol, Sch Engn, CH-1015 Lausanne, Switzerland
[2] Delft Univ Technol, Delft, Netherlands
[3] Univ Calif Los Angeles, Dept Chem & Biochem, Los Angeles, CA 90024 USA
[4] USI, ALaRI, Lugano, Switzerland
来源
OPTICS EXPRESS | 2014年 / 22卷 / 14期
关键词
PHOTON AVALANCHE-DIODES; P-N JUNCTIONS; FILL-FACTOR; SILICON; SPECTROSCOPY; ARRAYS;
D O I
10.1364/OE.22.017573
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
We present the architecture and three applications of the largest resolution image sensor based on single-photon avalanche diodes (SPADs) published to date. The sensor, fabricated in a high-voltage CMOS process, has a resolution of 512 x 128 pixels and a pitch of 24 mu m. The fill-factor of 5% can be increased to 30% with the use of microlenses. For precise control of the exposure and for time-resolved imaging, we use fast global gating signals to define exposure windows as small as 4 ns. The uniformity of the gate edges location is similar to 140 ps (FWHM) over the whole array, while in-pixel digital counting enables frame rates as high as 156 kfps. Currently, our camera is used as a highly sensitive sensor with high temporal resolution, for applications ranging from fluorescence lifetime measurements to fluorescence correlation spectroscopy and generation of true random numbers. (C) 2014 Optical Society of America
引用
收藏
页码:17573 / 17589
页数:17
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