High Tc superconducting quantum interference devices made by ion irradiation

被引:35
作者
Bergeal, N.
Lesueur, J.
Faini, G.
Aprili, M.
Contour, J. P.
机构
[1] ESPCI, UPR5, CNRS, Phys Quant Lab, F-75231 Paris, France
[2] CNRS, LPN, Lab Photon & Nanostruct, F-91404 Marcoussis, France
[3] CNRS, Unite Mixte Phys, THALES, F-91404 Orsay, France
关键词
D O I
10.1063/1.2348782
中图分类号
O59 [应用物理学];
学科分类号
摘要
The authors describe a method to make superconducting quantum interference devices (SQUIDs) formed in a single layer of high T-c superconducting materials. The superconducting loop is patterned using ion beam irradiation through an in situ suitable gold mask. Josephson junctions are defined by a lower fluence irradiation through narrow slits opened in a polymethyl methacrylate resist. The critical current and the resistance of the SQUIDs at a given temperature can be adjusted precisely by choosing the fluence of irradiation to make the device operational at temperatures between 4.2 K and the T-c of the superconducting material. (c) 2006 American Institute of Physics.
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页数:3
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