Hetro-Dielectric (HD) Oxide-Engineered Junctionless Double Gate all around (DGAA) Nanotube Field Effect Transistor (FET)

被引:12
作者
Kumar, Raj [1 ]
Kumar, Arvind [1 ]
机构
[1] Panjab Univ, Univ Inst Engn & Technol, Chandigarh, India
关键词
Hetro-dielectric (HD); Nanotube (NT); Junctionless; DIBL; SS; Leakage current; DESIGN;
D O I
10.1007/s12633-020-00705-w
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
This paper proposed Hetero-Dielectric (HD) Oxide-Engineered Junctionless double gate all around nanotube (DGAA-NT) FET for performance enhancement in low power circuits. In HD configuration, hafnium based high-k dielectric (HfO(2)and HfxTi1-xO2) as gate oxide (for inner as well as outer gate oxide) is introduced on source side and SiO(2)on drain side of HD JL-DGAA-NT FET. The tunnelling width and source-to-channel barrier height are significantly increased in the HD-JL-DGAA-NT FET as compared JL-DGAA-NT FET, causes the reduction in leakage current an order of 10(-14)to 10(-17)and I-ON/I(OFF)ratio increased by 54%. It has been observed that side spacer with suitable dielectric constant can be considered to improve the performance of device. Further, Subthreshold slope (SS) and DIBL and I-ON/I(OFF)current ratio has shown tremendous improvement on reducing channel thickness from 10 nm to 8 nm. It has been found that in HD-JL-DGAA-NT FET provides 25% and 57% improvement in SS and DIBL respectively. Therefore, HD-JL-DGAA-NT FET with adequate design parameters and dielectric material may be used for future digital applications.
引用
收藏
页码:2177 / 2184
页数:8
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