Modeling of electrostatic MEMS components

This paper describes an analytical approach for the network-type modeling of pull-in comb drives based on a mathematical field description using conformal mapping methods. The model was coded in MAST(R) for the SABER(R) simulator and its accuracy was compared to FDM and boundary element simulations using MAFIA and MEMCAD(R). This approach leads to a library of network-type multi domain component models for the system simulation of MEMS, providing nearly the accuracy of field-solving codes at network-type simulation speed.