Local deformation gradients in epitaxial Pb(Zr0.2Ti0.8)O3 layers investigated by transmission electron microscopy

被引:6
作者
Denneulin, T. [1 ,2 ,3 ]
Wollschlaeger, N. [4 ]
Everhardt, A. S. [5 ]
Farokhipoor, S. [5 ]
Noheda, B. [5 ]
Snoeck, E. [1 ]
Hytch, M. [1 ]
机构
[1] CNRS, CEMES, 29 Rue Jeanne Marvig, F-31055 Toulouse, France
[2] Forschungszentrum Julich, Ernst Ruska Ctr Microscopy & Spect Electrons, D-52425 Julich, Germany
[3] Forschungszentrum Julich, Peter Grunberg Inst, D-52425 Julich, Germany
[4] BAM, Unter Eichen 87, D-12205 Berlin, Germany
[5] Univ Groningen, Zernike Inst Adv Mat, NL-9747 AG Groningen, Netherlands
基金
欧洲研究理事会;
关键词
ferroelectric; PZT; strain; electron holography; TEM; FERROELASTIC DOMAIN-WALLS; THIN-FILM; POLARIZATION; PBTIO3; DISLOCATIONS; RELAXATION; RESOLUTION;
D O I
10.1088/1361-648X/aabd00
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
Lead zirconate titanate samples are used for their piezoelectric and ferroelectric properties in various types of micro-devices. Epitaxial layers of tetragonal perovskites have a tendency to relax by forming 90 degrees ferroelastic domains. The accommodation of the a/c/a/c polydomain structure on a flat substrate leads to nanoscale deformation gradients which locally influence the polarization by flexoelectric effect. Here, we investigated the deformation fields in epitaxial layers of Pb(Zr0.2Ti0.8)O-3 grown on SrTiO3 substrates using transmission electron microscopy (TEM). We found that the deformation gradients depend on the domain walls inclination (+45 degrees or -45 degrees to the substrate interface) of the successive 90 degrees domains and we describe three different a/c/a domain configurations: one configuration with parallel a-domains and two configurations with perpendicular a-domains (V-shaped and hat-Lambda-shaped). In the parallel configuration, the c-domains contain horizontal and vertical gradients of out-of-plane deformation. In the V-shaped and hat-Lambda-shaped configurations, the c-domains exhibit a bending deformation field with vertical gradients of in-plane deformation. Each of these configurations is expected to have a different influence on the polarization and so the local properties of the film. The deformation gradients were measured using dark-field electron holography, a TEM technique, which offers a good sensitivity (0.1%) and a large field-of-view (hundreds of nanometers). The measurements are compared with finite element simulations.
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页数:11
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