The creation of structural defects on natural graphite surfaces by slight treatment of oxygen plasma was studied by scanning tunneling microscopy (STM) at nanoscopic scale. Most of the defects were vacancies with the depth of one or two layers, while the mean number of defects per mu m(2) of graphite surface and the mean area of defects increased with the increase in input power, time and temperature of the irradiation. After very slight treatment at room temperature, single carbon atom vacancies were obtained on graphite surfaces with a percentage more than 50%, though some large vacancies were formed. After slight irradiation at a high temperature (400 degrees C), an agglomeration of defects occurred (the mean area increases whereas the defect density decreases), while the defects once formed a,ere difficult to be annealed by healing at high temperatures up to 400 degrees C in vacuum. The present work showed the possibility to control the modification of natural graphite surfaces for further applications by changing the condition of oxygen plasma treatment. (C) 1999 Elsevier Science Ltd. All rights reserved.